@inproceedings{inproceedings58033e6e,
title   = {A new mechanism for silicon etching with fluorine based plasmas},
author = {Verdonck, Patrick Bernard and Goodyear, A. and Mansano, Ronaldo Domingues and Barroy, P.R.J. and Braithwaite, N.St.J.},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}