@inproceedings{inproceedings3d39caa1,
title   = {A new experimental procedure to obtain the refractive index of MOS gate oxynitrides grown by RTP in N2O atmosphere},
author = {Toquetti, Leandro Zeidan and Santos Filho, Sebastião Gomes dos},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}