@inproceedings{inproceedings4dd54ec5,
title   = {Analysis of TEOS+O2 plasma - the influence of energy and gas flow on the deposition process},
author = {Silva, Ana Neilde Rodrigues da and Silva, Maria Lucia Pereira da and Morimoto, Nilton Itiro and Bonnaud, Olivier},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}