@inproceedings{inproceedings92c568bf,
title   = {RF electrical measurements in plasma processing reactors},
author = {Pisani, Marcelo B. and Verdonck, Patrick Bernard},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}