@inproceedings{inproceedings80262ca4,
title   = {Optimization of multilayered porous silicon formation by automatic control},
author = {Oliveira, Alex Lopes de and Perez Lisboa, Mauricio Oscar and Galeazzo, Elisabete and Ramírez Fernandez, Francisco Javier},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}