@inproceedings{inproceedings835ab3ee,
title   = {Partial dielectric breakdown in MOS gate oxide grown by RTO},
author = {Nogueira, Willian Aurélio and Santos Filho, Sebastião Gomes dos},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}