@article{articleffa0ff6b,
title   = {End-point detection of polymer etching using Langmuir probes},
author = {Castro, Raul Murete de and Verdonck, Patrick Bernard and Pisani, Marcelo B. and Mansano, Ronaldo Domingues and Cirino, Giuseppe Antonio and Maciel, Homero Santiago and Massi, Marcos},
year = {2000},
doi = {10.1109/27.887774},
journal   = {IEEE Transactions on Plasma Science}
}