@inproceedings{inproceedings36418714,
title   = {Fabrication of self-sustained membranes using PECVD SiOxNy films},
author = {Lopes, Alexandre Tavares and Alayo Chávez, Marco Isaías and Paez Carreño, Marcelo Nelson and Pereyra, Inés},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}