@inproceedings{inproceedings00fa3ca3,
title   = {Fabrication of silicon probes for biosensors},
author = {Fontes, Marcelo Bariatto Andrade and Furlan, Rogério and Santiago-Avilés, Jorge Juan and Mansano, Ronaldo Domingues},
year = {2000},
publisher = {SBMicro/UA/UFRGS/UNICAMP/USP},
booktitle   = {International Conference on Microelectronics and Packaging}
}