@article{articlee9e9a290,
title   = {Influence of ion energy and arrival rate on x-ray crystallographic properties of thin Zr'O IND.X' films prepared on Si(111) substrate by ion-beam assisted deposition},
author = {Matsuoka, Masao and Isotani, Sadao and Chubaci, José Fernando Diniz and Miyake, S and Setsuhara, Y and Ogata, K and Kuratani, N},
year = {2000},
doi = {10.1063/1.1286108},
journal   = {Journal of Applied Physics}
}