@article{articleefdae46d, title = {The role of the species formed in PECVD systems on the density of states of a-Si:H films}, author = {Martins, R. and Vieira, M. and Fortunato, E. and Santos, M. and Dirani, Ely Antonio Tadeu and Carvalho, N. and Baia, I. and GuimarĂ£es, I.}, year = {1990}, journal = {Materials Research Society Symposium Proceedings} }