@inproceedings{inproceedings6c0f34eb,
title   = {PECVD deposited dielectrics for a-Si:H thin film transistors},
author = {Sassaki, Carlos Alberto and Andrade, Adnei Melges de and Fonseca, Fernando Josepetti and Abade, Kátia Aparecida and Dirani, Ely Antonio Tadeu and Sanematsu, Mário Sabro},
year = {1996},
publisher = {IM/CTI},
booktitle   = {Seminário Iberoamericano de Tecnologia de Mostradores de Cristal Líquido}
}