@article{article24e7cb89,
title   = {LPCVD deposition of silicon nitride assisted by high density plasmas},
author = {Zambom, Luís da Silva and Mansano, Ronaldo Domingues and Furlan, Rogério and Verdonck, Patrick Bernard},
year = {1999},
doi = {10.1016/s0040-6090(98)01587-9},
journal   = {Thin Solid Films}
}