@article{articled2376f86,
title   = {Influence of plasma etching on Raman spectra of DLC films deposited by magnetron sputtering},
author = {Massi, Marcos and Mansano, Ronaldo Domingues and Maciel, Homero Santiago and Otani, C. and Verdonck, Patrick Bernard and Nishioka, L. N. B. M.},
year = {1999},
journal   = {Boletim Técnico da Escola Politécnica da USP. Departamento de Engenharia Eletrônica}
}