@inproceedings{inproceedings789b9804, title = {Finite element modeling of an ultrasonic capacitive tranducer}, author = {Adamowski, Júlio Cezar and Silva, Emílio Carlos Nelli and Simon, Claudio and Buiochi, Flávio and Higuti, Ricardo Tokio}, year = {1994}, publisher = {IEEE}, booktitle = {IEEE Ultrasonics Symposium} }