@inproceedings{inproceedings4d028c0a,
title   = {Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes},
author = {Simões, Eliphas Wagner and Mansano, Ronaldo Domingues and Furlan, Rogério and Verdonck, Patrick Bernard},
year = {1998},
publisher = {S N},
booktitle   = {International Conference on Microelectronics and Packaging}
}