@inproceedings{inproceedings2cb42332,
title   = {Silicon nitride coupled plasma deposited from mixtures of silane-nitrogen and silane-ammonia},
author = {Zambom, Luís da Silva and Furlan, Rogério and Mansano, Ronaldo Domingues},
year = {1999},
publisher = {SBMicro/IMAPS},
booktitle   = {International Conference on Microelectronics and Packaging}
}