@inproceedings{inproceedings54c215e5,
title   = {Dopant redistribution during the formation of cobal silicide using two thermal stages},
author = {Simões, Eliphas Wagner and Furlan, Rogério and Santiago-Avilés, Jorge Juan},
year = {1997},
publisher = {VMIC},
booktitle   = {International VLSI Multilevel Interconnection Conference - VMIC}
}