@inproceedings{inproceedings23ea766c,
title   = {Deposition of silicon nitride films by LPCVD assisted by high density plasma},
author = {Zambom, Luís da Silva and Mansano, Ronaldo Domingues and Furlan, Rogério},
year = {1998},
publisher = {Institute of Physics},
booktitle   = {International Vacuum Congress}
}