@inproceedings{inproceedingsf74290ae,
title   = {Raman spectroscopy and AFM analisys of low temperature µc-Si:H films},
author = {Dirani, Ely Antonio Tadeu and Faria, Roberto Mendonça and Fonseca, Fernando Josepetti and Andrade, Adnei Melges de},
year = {1998},
publisher = {LACTRO/LAC},
booktitle   = {International Conference on Microelectronics and Packaging}
}