@inproceedings{inproceedings5470c4e8,
title   = {Silicon surface roughness induced by reactive ion etching processes, using a graphite electrode. (Em CD-Rom)},
author = {Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues and Maciel, Homero Santiago},
year = {1997},
publisher = {SBMICRO/EFEI},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}