@inproceedings{inproceedingsed1f40cd,
title   = {Fabrication process of free-standing polysilicon microfilaments using PECVD silicon oxide as a sacrificial layer},
author = {Simões, Eliphas Wagner and Furlan, Rogério and Morimoto, Nilton Itiro and Bonnaud, Olivier and Silva, Ana Neilde Rodrigues da},
year = {1997},
publisher = {University of Southampton},
booktitle   = {Workshop on Micromachines, Micromechanics & Microsyems}
}