@inproceedings{inproceedingsfb814adb,
title   = {Silicon wall profiles generated by isotropic dry etching process},
author = {Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Maciel, Homero Santiago},
year = {1997},
publisher = {Société Française du Vide},
booktitle   = {International Colloquium on Plasma Processes}
}