@inproceedings{inproceedings00d2a16c,
title   = {Characteristics of silicon etching processes in a RIE reactor modified to include a built-in radio frequency excitation coil. (em CD-Rom)},
author = {Massi, Marcos and Mansano, Ronaldo Domingues and Maciel, Homero Santiago and Verdonck, Patrick Bernard},
year = {1997},
publisher = {SBMICRO/EFEI},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}