@inproceedings{inproceedings66a5e3b6,
title   = {Formation of very low leakage current pn junction by low temperature annealing assisted by Xe-lamp irradiation. (em CD-Rom)},
author = {Oka, Mauricio Massazumi and Nakada, A and Tamai, Y and Shibata, T and Ohmi, T},
year = {1997},
publisher = {SBMICRO/EFEI},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}