@inproceedings{inproceedingsc5ddfcdb,
title   = {Mechanisms of metal and sulfur contamination on silicon wafer surfaces during HF-last cleanings. (em CD-Rom)},
author = {Santos Filho, Sebastião Gomes dos and Hasenack, Claus Martin},
year = {1997},
publisher = {SBMICRO/EFEI},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}