@article{article156aeb1e,
title   = {High quality low temperature DPECVD silicon dioxide},
author = {Pereyra, Inés and Alayo Chávez, Marco Isaías},
year = {1997},
doi = {10.1016/s0022-3093(96)00650-3},
journal   = {Journal of Non-Crystalline Solids}
}