@article{article824badd2,
title   = {Carbon incorporation in 'PECVD''A-SI IND. 1-X''C ind. X': 'H' in the low power density regime},
author = {Pereyra, Inés and Paez Carreño, Marcelo Nelson and Prado, Rogerio Junqueira and Tabacniks, Manfredo Harri and Fantini, Márcia Carvalho de Abreu},
year = {1997},
journal   = {Brazilian Journal of Physics}
}