@article{article9f01d155,
title   = {Effect of oxygen additive on microwave plasma for diamond film synthesis by the plasma impedance measurement},
author = {Miyake, Hideaki and Sugahara, K I and Kobayashi, T and Kondo, K and Taniguchi, M and Sugiyo, M},
year = {1996},
journal   = {Japanese Journal Applied Physics}
}