@inproceedings{inproceedings9e4a9a5b,
title   = {Electroless mechanism of 'CU' plating onto 'SI' during hf-last cleanings},
author = {Santos Filho, Sebastião Gomes dos and Hasenack, Claus Martin},
year = {1996},
publisher = {Sbmicro},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}