@inproceedings{inproceedingsc578156d,
title   = {Development of spacer etching processes for 'GA''AS' ic technologies},
author = {Dietrich, Alvaro Batista and Verdonck, Patrick Bernard and Swart, Jacobus Willibrordus},
year = {1996},
publisher = {Sbmicro},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}