@inproceedings{inproceedings748de4ae,
title   = {Influence of deposition parameters at the structural characteristics of silicon dioxide deposited by pecvd at low temperatures},
author = {Alayo Chávez, Marco Isaías and Pereyra, Inés},
year = {1996},
publisher = {Sbmicro},
booktitle   = {Conference of the Brazilian Microeletronics Society}
}