@article{articlee3ff4bbf,
title   = {Plasma-assisted chemical vapour deposition in a tunable microwave cavity},
author = {Salvadori, Maria Cecília Barbosa da Silveira and Mammana, V P and Martins, O G and Degasperi, F T},
year = {1995},
doi = {10.1088/0963-0252/4/3/019},
journal   = {Plasma Sources Science Technology}
}