@article{article9c6272a9,
title   = {Rapid thermal oxidation of silicon with different thermal annealing cycles in nitrogen: influence on surface microroughness and electrical characteristics},
author = {Santos Filho, Sebastião Gomes dos and Hasenack, Claus Martin and Lopes, M C V and Baranauskas, V},
year = {1995},
doi = {10.1088/0268-1242/10/7/015},
journal   = {Semiconductor Science and Technology}
}