@inproceedings{inproceedings3ab8b724,
title   = {Starving plasma effect on pecvd hydrogenated amorphous silicon carbide},
author = {Páez Carreño, Marcelo Nelson and Pereyra, Inés},
year = {1995},
publisher = {Instituto de Informatica da Ufrgs},
booktitle   = {Congress of the Brazilian Microelectronics Society}
}