@inproceedings{inproceedings23469a87,
title   = {Cluster tool system for silicon oxide deposition},
author = {Morimoto, Nilton Itiro and Swart, Jacobus Willibrordus},
year = {1995},
publisher = {Instituto de Informatica da Ufrgs},
booktitle   = {Congress of the Brazilian Microelectronics Society}
}