@inproceedings{inproceedingse2d66553,
title   = {Pecvd teos silicon oxide deposited in a home made cluster tool system},
author = {Morimoto, Nilton Itiro and Swart, Jacobus Willibrordus and Yoshihiro, F M},
year = {1995},
publisher = {Instituto de Informatica da Ufrgs},
booktitle   = {Congress of the Brazilian Microelectronics Society}
}