@inproceedings{inproceedingsbcbbd0db,
title   = {Development and characterization of 'SI IND.3''N IND.4' plasma etching processes},
author = {Dietrich, Alvaro Batista and Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues},
year = {1995},
publisher = {Instituto de Informatica da Ufrgs},
booktitle   = {Congress of the Brazilian Microelectronics Society}
}