@inproceedings{inproceedings7ce87909,
title   = {Contamination caused by reactive ion etching plasmas and subsequent cleaning procedures},
author = {Verdonck, Patrick Bernard and Mansano, Ronaldo Domingues},
year = {1994},
publisher = {Sbmicro/Ufrj},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}