@inproceedings{inproceedingsc64b4499,
title   = {Reactive ion etching of 'GA''AS' in cc14-n2 plasmas},
author = {Verdonck, Patrick Bernard and Swart, Jacobus Willibrordus and Mansano, Ronaldo Domingues and Ordonez, N},
year = {1994},
publisher = {Sbmicro/Ufrj},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}