@inproceedings{inproceedings4e0e2a50,
title   = {Internal and external proximity effects in a focused electron-beam nanolithography},
author = {Silva, Marcelo de Assumpção Pereira da and Rossi, J C and Basmaji, Pierre and Aegerter, Michel André and Nastaushev, Y V and Gusev, Guennadii Michailovich},
year = {1994},
publisher = {Sociedade Brasileira de Fisica},
booktitle   = {Encontro Nacional de Fisica da Materia Condensada}
}