@inproceedings{inproceedings29719eab,
title   = {Etching of tungsten in a magnetically confined plasma reactor: general trends and etch rate limiting mechanisms},
author = {Verndonck, P B and De Geyter, P and Swart, Jacobus Willibrordus},
year = {1993},
publisher = {Sbmicro},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}