@inproceedings{inproceedingscedd4736,
title   = {Sal601-er7 as a negative tone resist for mask - making},
author = {Seabra, Antonio Carlos and Jonckheere, R and Van den Hove, L},
year = {1993},
publisher = {Sbmicro},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}