@inproceedings{inproceedings861ffab3,
title   = {Development of an aluminium plasma etch process with cci4 and n2},
author = {Franzin, Renato Marcelo and Verdonck, Patrick Bernard},
year = {1993},
publisher = {Ufpe},
booktitle   = {Congresso Brasileiro de Aplicacoes de Vacuo Na Industria e Na Ciencia}
}