@article{articleb6e214f7,
title   = {Simple, safe, and economical microwave plasma -assisted chemical vapor deposition facility},
author = {Brewer, M A and Brown, I G and Dickinson, M R and Galvin, J E and Macgill, R A and Salvadori, Maria Cecília Barbosa da Silveira},
year = {1992},
doi = {10.1063/1.1142557},
journal   = {Review of Scientific Instruments}
}