@article{article69d36769, title = {Analysis of the mean crystallite size and microstress in titanium silicide thin films}, author = {Morimoto, Nilton Itiro and Swart, Jacobus Willibrordus and Riella, Humberto Gracher}, year = {1989}, doi = {10.1016/0169-4332(89)90517-5}, journal = {Applied Surface Science} }