In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films (2003)
Oliveira, Alessandro Ricardo de; Paez Carreño, Marcelo Nelson 
Fonte: Microelectronic Technology and Devices SBMicro 2003. Unidade: EP
Assunto: MICROELETRÔNICA
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OLIVEIRA, Alessandro Ricardo de e PAEZ CARREÑO, Marcelo Nelson. In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films. Microelectronic Technology and Devices SBMicro 2003. Tradução . Pennington: Electrochemical Society, 2003. . . Acesso em: 16 nov. 2025.APA
Oliveira, A. R. de, & Paez Carreño, M. N. (2003). In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films. In Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society.NLM
Oliveira AR de, Paez Carreño MN. In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ]Vancouver
Oliveira AR de, Paez Carreño MN. In-situ and ion implantation nitrogen doping on near stoichiometric a-SiC:H films. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ]
