Low cost ion implantation technique (2012)
Salvadori, M C 
; Teixeira, F S ; Sgubin, L G ; Araújo, W W R ; Spirin, R E; Oks, E M; Yu, K M; Brown, I G
Source: Applied Physics Letters. Unidade: IF
Assunto: FILMES FINOS
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ABNT
SALVADORI, M C et al. Low cost ion implantation technique. Applied Physics Letters, v. 101, n. 22, p. 224104/1-224104/4, 2012Tradução . . Disponível em: https://doi.org/10.1063/1.4768699. Acesso em: 03 nov. 2025.APA
Salvadori, M. C., Teixeira, F. S., Sgubin, L. G., Araújo, W. W. R., Spirin, R. E., Oks, E. M., et al. (2012). Low cost ion implantation technique. Applied Physics Letters, 101( 22), 224104/1-224104/4. doi:10.1063/1.4768699NLM
Salvadori MC, Teixeira FS, Sgubin LG, Araújo WWR, Spirin RE, Oks EM, Yu KM, Brown IG. Low cost ion implantation technique [Internet]. Applied Physics Letters. 2012 ;101( 22): 224104/1-224104/4.[citado 2025 nov. 03 ] Available from: https://doi.org/10.1063/1.4768699Vancouver
Salvadori MC, Teixeira FS, Sgubin LG, Araújo WWR, Spirin RE, Oks EM, Yu KM, Brown IG. Low cost ion implantation technique [Internet]. Applied Physics Letters. 2012 ;101( 22): 224104/1-224104/4.[citado 2025 nov. 03 ] Available from: https://doi.org/10.1063/1.4768699
