Experimental study of lateral growth of titanium silicide (1990)
Source: Anais. Conference titles: Congresso da Sociedade Brasileira de Microeletronica. Unidade: EP
Assunto: SEMICONDUTORES
ABNT
OKA, Mauricio Massazumi e SWART, Jacobus Willibrordus. Experimental study of lateral growth of titanium silicide. 1990, Anais.. Campinas: Sbmicro/Spie, 1990. . Acesso em: 23 abr. 2024.APA
Oka, M. M., & Swart, J. W. (1990). Experimental study of lateral growth of titanium silicide. In Anais. Campinas: Sbmicro/Spie.NLM
Oka MM, Swart JW. Experimental study of lateral growth of titanium silicide. Anais. 1990 ;[citado 2024 abr. 23 ]Vancouver
Oka MM, Swart JW. Experimental study of lateral growth of titanium silicide. Anais. 1990 ;[citado 2024 abr. 23 ]