Microlens array fabricated by gray-scale lithography maskless system (2012)
Source: Microelectronics technology and devices, SBMicro. Conference titles: International Symposium on Microelectronics Technology and Devices. Unidades: EP, EESC
Assunto: MICROELETRÔNICA
ABNT
CIRINO, Giuseppe Antonio et al. Microlens array fabricated by gray-scale lithography maskless system. 2012, Anais.. Pennington: Escola Politécnica, Universidade de São Paulo, 2012. Disponível em: https://doi.org/10.1149/04901.0339ecst. Acesso em: 26 ago. 2024.APA
Cirino, G. A., Lopera Aristizábal, S., Montagnoli, A. N., Mansano, R. D., & Goncalves Neto, L. (2012). Microlens array fabricated by gray-scale lithography maskless system. In Microelectronics technology and devices, SBMicro. Pennington: Escola Politécnica, Universidade de São Paulo. doi:10.1149/04901.0339ecstNLM
Cirino GA, Lopera Aristizábal S, Montagnoli AN, Mansano RD, Goncalves Neto L. Microlens array fabricated by gray-scale lithography maskless system [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 ago. 26 ] Available from: https://doi.org/10.1149/04901.0339ecstVancouver
Cirino GA, Lopera Aristizábal S, Montagnoli AN, Mansano RD, Goncalves Neto L. Microlens array fabricated by gray-scale lithography maskless system [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 ago. 26 ] Available from: https://doi.org/10.1149/04901.0339ecst